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材料簡介
Introduction
口徑超過一米。
在室溫區(qū)間下具有近零的熱膨脹系數(shù),且熱膨脹均勻性好,應(yīng)力低,可根據(jù)客戶要求定制一定零膨點溫度區(qū)域的產(chǎn)品。
作為精密光路系統(tǒng)的反射鏡、激光諧振腔體等部件,應(yīng)用于天基太空望遠鏡、半導(dǎo)體光刻設(shè)備用光學(xué)元件等高精尖領(lǐng)域。
Ultra-low expansion quartz glass with a diameter of more than 1meter, It has a near-zero thermal expansion coefficient in the room temperature range, and the zero expansion point temperature range is controllable. As a mirror of precision optical system, laser resonant cavity and other components, it is used in space-based space telescopes, optical components for semiconductor lithography equipment, atomic clocks and other fields.
熱膨脹系數(shù)
Coefficient of Thermal Expansion
熱膨脹系數(shù)低
Near-zero thermal expansion coefficient
可控的零膨點區(qū)間
Controllable zero expansion point interval
CTE均勻值
CTE Homogeneity
OD660×50mm CTE均勻性(PV):30 ppb
OD660×30mm 應(yīng)力雙折射均值 :9.79 nm/cm
OD950×65 mm CTE均勻性(PV):17.1 pp ppb
OD950×60 mm 應(yīng)力雙折射均值:12.31 nm/cm
160×160×10 mm CTE均勻性(PV) :<10 ppb
160×160×10 mm 應(yīng)力雙折射均值 :2.71 nm/cm
物理性能
Physical properties
生產(chǎn)廠商
平均線膨脹系數(shù)5-30℃(α)
導(dǎo)熱系數(shù) (K)
熱擴散率 (D)
體積熱阻率200°C,100Hz (R)
平均比熱(Cp)
應(yīng)變點
退火點
軟化點
泊松比(v)
極限拉伸應(yīng)力 (MOR)
努氏硬度,200g 載荷
密度(ρ)
比剛度(E/ρ)
剪切模量 (G)
體積模量 (K)
彈性模量 (E)
應(yīng)力光學(xué)系數(shù)
折射率(標稱 CTE 材料)
阿貝數(shù)
LEQZ?
0 - ±30ppb/℃
1.31 w / (m· ℃) [1.13 kcal / (m·h·℃)]
0.0079 cm/s
10 11.6 ohm· cm
767 J / (kg·℃)
[0.183 cal / (g·℃)]
890 ℃ [1634°F]
1000 ℃ [1832°F]
1490 ℃ [2714°F]
49.8 MPa [7220 psi]
518kg / mm2
2.21g / cm3 [0.079 lb / in3 ]
3.12x10m6[1.23 x 108 in]
29.0 GPa [4.20 x 106 psi]
34.1 GPa [4.95 x 106 psi]
67.6 GPa [9.80 x 106 psi]
3.12x10 m6[1.23 x 108in]
5-20 (nm/cm)/(kg/cm2 )
nF (486 nm) 1.4892
nD(589 nm) 1.4828
nC (656 nm) 1.480
53.1
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